![\"\"](\"http:\/\/pic.doit.cn\/2018\/08\/a45b51ac182a762eb2dd6c6fe6b56f4e.png\")
<\/a><\/p>\n\u8fd9\u662f\u6211\u4e3b\u8981\u8bb2\u7684\u5185\u5bb9\uff0c\u4e00\u65b9\u9762\u5173\u4e8e\u95ea\u5b58\u7684\u53d1\u5c55\uff0c\u4ece2D\u5e73\u9762\u95ea\u5b58\u52303D\u95ea\u5b58\u7684\u8fc7\u7a0b\u3002\u53e6\u4e00\u65b9\u9762\u91cd\u70b9\u4ecb\u7ecd3D\u95ea\u5b58\u53ef\u9760\u6027\u65b9\u9762\u6240\u505a\u7684\u90e8\u5206\u7814\u7a76\u5de5\u4f5c\uff0c\u4e3b\u8981\u6d89\u53caLDPC\u7ea0\u9519\u7801\u7684\u5b58\u50a8\u4f18\u5316\uff0c\u5236\u7a0b\u5dee\u5f02\u7684\u53ef\u9760\u6027\u4f18\u5316\u4e24\u4e2a\u65b9\u9762\u7684\u6280\u672f\uff0c\u6700\u540e\u5bf9\u672c\u62a5\u544a\u8fdb\u884c\u4e00\u4e2a\u603b\u7ed3\u3002<\/p>\n
2D\u5e73\u9762\u95ea\u5b58\u4e3b\u8981\u6709\u4e24\u4e2a\u53d1\u5c55\u65b9\u6cd5\uff1a<\/strong><\/p>\n \u4e00\u662f\u5c3a\u5bf8\u7684\u7f29\u5c0f\uff0c\u6211\u4eec\u89c2\u5bdf\u5230\u76842D\u95ea\u5b58\u7684\u63a8\u51fa\u4ea7\u54c1\u7684\u6700\u5c0f\u5c3a\u5bf8\u662f14nm\uff0c\u5173\u4e8e\u5c3a\u5bf8\u7684\u7f29\u5c0f\u7684\u6700\u8fd1\u7684\u5de5\u4f5c\u8981\u8ffd\u6eaf\u52302016\u5e74\uff0c\u7531\u4e09\u661f\u53d1\u5e0314\u7eb3\u7c73\u5236\u7a0b2\u6bd4\u7279\u5b58\u50a8\u5143\uff0c\u4e4b\u540e\u6ca1\u6709\u770b\u52302D\u50a8\u5b58\u4e0a\u7684\u7f29\u5c0f\u3002<\/p>\n \u4e8c\u662f\u4ece\u5355\u4e2a\u5b58\u50a8\u5143\u6bd4\u7279\u4e2a\u6570\u7684\u589e\u52a0\uff0c\u4e5f\u5c31\u662f\u5355\u5b58\u50a8\u5143\u91cc\u9762\u53ef\u4ee5\u5b58\u50a8\u66f4\u591a\u7684\u6bd4\u7279\uff0c\u6700\u65b0\u7684\u5de5\u4f5c\u5219\u662f2013\u5e74\u53f0\u6e7e\u65fa\u5b8f\u63a8\u51fa\u76846\u6bd4\u7279\u6bcf\u5b58\u50a8\u5143\u572845\u7eb3\u7c73\u4e0b\u7684\u6280\u672f\u3002\u4ee5\u4e0a\u4e24\u79cd\u6280\u672f\u5230\u76ee\u524d\u4e3a\u6b62\u57fa\u672c\u4e0a\u5df2\u7ecf\u7ec8\u6b62\uff0c\u8fd9\u662f\u56e0\u4e3a\u4ed6\u4eec\u7684\u53d1\u5c55\u4f1a\u5bfc\u81f4\u53ef\u9760\u6027\u548c\u6027\u80fd\u7684\u4e25\u91cd\u4e0b\u964d\u3002\u6240\u4ee5\uff0c\u4ece2006\u5e74\u5f00\u59cb3D\u95ea\u5b58\u7684\u6982\u5ff5\u5f00\u59cb\u8fdb\u5165\u6211\u4eec\u7684\u89c6\u91ce\u3002<\/p>\n \u5177\u4f53\u6211\u4eec\u6765\u770b\u4e00\u4e0b\uff0c\u6211\u628a3D\u95ea\u5b58\u7684\u53d1\u5c55\u5206\u6210\u4e24\u4e2a\u9636\u6bb5\uff0c\u4e00\u4e2a\u662f\u7406\u8bba\u9636\u6bb5\uff0c\u4e8c\u662f\u4ea7\u54c1\u9636\u6bb5\u3002<\/strong><\/p>\n \u4ece2006\u5f00\u59cb\u63d0\u51fa3D\u95ea\u5b58\u6982\u5ff5\u4ee5\u6765\uff0c\u591a\u79cd3D\u95ea\u5b58\u67b6\u6784\u5df2\u7ecf\u89c1\u8bf8\u62a5\u7aef\u3002\u5305\u62ecStacked NAND\uff0cBICS\uff0cP-BICS\u4ee5\u53caTCAT\u7b49\u7b49\uff0c\u4f46\u662f\u57282012\u5e74\u4e4b\u524d\uff0c\u8fd9\u4e9b\u67b6\u6784\u4f9d\u7136\u5904\u5728\u9a8c\u8bc1\u548c\u6837\u54c1\u9636\u6bb5\uff0c\u5e76\u672a\u8fdb\u5165\u5b9e\u9645\u4ea7\u54c1\u9636\u6bb5\u3002\u4e4b\u540e\u7531\u4e1c\u829d\u63d0\u51fa\u7684\u67b6\u6784\u771f\u6b63\u5f00\u59cb\u5b9e\u73b0\u53ef\u7528\uff0c\u7136\u540e\u51fa\u73b0\u4e86\u4e1c\u829d\u540e\u7eed\u63d0\u51fa\u7684\u548c\u4e09\u661f\u63d0\u51fa\u7684\u591a\u79cd\u7c7b\u578b\u7684\u67b6\u6784\u3002<\/p>\n 2013\u5e74\u5f00\u59cb\u51fa\u73b0\u4ea7\u54c1\uff0c2013\u5e74\u4e09\u661f\u516c\u53f8\u5728ISSCC\u5927\u4f1a\u4e0a\u53d1\u8868\u4e86\u7b2c\u4e00\u4e2a\u4ea7\u54c1\u7ea7\u76843D NAND\u95ea\u5b58\u4ea7\u54c1\uff0c\u5b83\u662f\u91c7\u752824\u5c42\u7684TCAT\u67b6\u6784\uff0c\u5355\u4e2a\u5b58\u50a8\u51432\u4e2a\u6bd4\u7279\u7684\u7ed3\u6784\u6240\u6784\u6210\uff0c\u800c\u540e\u7ecf\u5386\u4e8632\u5c42\uff0c48\u5c42\uff0c64\u5c42\uff0c\u5230\u4eca\u5e74\u768496\u5c42\u3002\u660e\u5e74\u5c06\u4f1a\u662f128\u5c42\uff0c\u4ed6\u4eec\u666e\u904d\u91c7\u7528\u7684\u662fTLC\uff0c\u8fd9\u662f\u4e00\u4e2a\u5f88\u6709\u610f\u601d\u7684\u7279\u70b9\u3002\u800c\u5b58\u50a8\u5143\u7684\u6bd4\u7279\u4e2a\u6570\u4e5f\u4ece2\u6bd4\u7279\u53d1\u5c55\u5230\u6700\u65b0\u76844\u6bd4\u7279\u3002\u672a\u6765\u5355\u82af\u7247\u7684\u5b58\u50a8\u5bb9\u91cf\u5c06\u9ad8\u8fbe\u6570Tb\u7684\u5bb9\u91cf\u3002<\/p>\n 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Trap\uff08\u7535\u8377\u64b7\u53d6\uff09\u5b58\u50a8\u5143\u3002\u5176\u4e2dFG\u5b58\u50a8\u5143\u901a\u8fc7\u5728\u534a\u5bfc\u4f53\u4e2d\u5bc4\u5b58\u7535\u5b50\u7684\u65b9\u5f0f\u5b9e\u73b0\u6570\u636e\u5b58\u50a8\uff0c\u6c27\u5316\u5c42\u5b9e\u73b0\u6570\u636e\u975e\u6613\u5931\u3002\u800cCT\u5b58\u50a8\u5143\u5219\u662f\u901a\u8fc7\u7edd\u7f18\u4f53\u7684\u65b9\u5f0f\u5b9e\u73b0\u7535\u5b50\u5b58\u50a8\u3002\u8fd9\u4e2a\u56fe\u4e2d\uff0c\u6211\u4eec\u53ef\u4ee5\u770b\u5230FG\u7684\u5c3a\u5bf8\u666e\u904d\u6765\u8bf4\uff0c\u8981\u6bd4CT\u7684\u5927\u4e00\u4e9b\u3002\u539f\u56e0\u5728\u4e8eCT\u662f\u7edd\u7f18\u4f53\uff0c\u4ed6\u5bf9\u6c27\u5316\u5c42\u7684\u539a\u5ea6\u8981\u6c42\u4f4e\u5f88\u591a\uff0c\u6240\u4ee5CT\u7684\u6269\u5c55\u6027\u8981\u6bd4FG\u597d\u5f88\u591a\u3002\u800c\u4e14\u7531\u4e8e\u662f\u7edd\u7f18\u4f53\uff0c\u4ed6\u5bf9\u5b58\u50a8\u5143\u95f4\u7684\u5e72\u6270\u7b49\u90fd\u6709\u8f83\u597d\u7684\u7279\u6027\u3002<\/p>\n \u4ece\u5b58\u50a8\u5143\u5806\u53e0\u65b9\u5f0f\u6765\u770b\uff0c\u76ee\u524d\u6211\u4eec\u8c03\u7814\u53d1\u73b0\u6bd4\u8f83\u5e38\u7528\u7684\u662f\u4e24\u79cd\u67b6\u6784\uff0c\u4e00\u79cd\u662f\u4e1c\u829d\u63d0\u51fa\u7684BICS\u67b6\u6784\uff0c\u8fd9\u79cd\u67b6\u6784\u540e\u7eed\u6709\u4e00\u4e2a\u6539\u8fdb\u7684\u67b6\u6784\u53ebP-BiCS\u67b6\u6784\uff0c\u8fd9\u79cd\u67b6\u6784\u662f\u4e1c\u829d\u57282007\u5e74\u63d0\u51fa\u7684\uff0c\u53e6\u5916\u4e00\u79cd\u67b6\u6784\u662f\u6709\u4e09\u661f\u63d0\u51fa\u7684TCAT\u67b6\u6784\uff0c\u8fd9\u79cd\u67b6\u6784\u662f\u6709\u4e09\u661f\u57282009\u5e74\u63d0\u51fa\u7684\uff0c\u5e76\u57282013\u5e74\u9996\u6b21\u63a8\u51fa\u57fa\u4e8eTCAT\u768424\u5c42V-NAND\u95ea\u5b58\u3002\u5176\u4ed6\u7684\u5382\u5546\u7684\u8fd8\u5305\u62ecIntel\uff0c\u7f8e\u5149\uff0c\u6d77\u529b\u58eb\uff0c\u65fa\u5b8f\u4ee5\u53ca\u957f\u6c5f\u5b58\u50a8\u3002\u4f46\u662f\u6839\u636e\u6211\u4eec\u7684\u8c03\u7814\uff0c\u5927\u90e8\u5206\u9075\u4ece\u7684\u67b6\u6784\u8fd8\u662f\u4ee5\u4e0a\u4e24\u79cd\u5806\u53e0\u65b9\u5f0f\u3002\u5f53\u7136\u8fd8\u6709\u4e00\u4e9b\u5176\u4ed6\u7684\u5806\u53e0\u65b9\u5f0f\uff0c\u6bd4\u5982\u53f0\u6e7e\u65fa\u8679\u5f88\u957f\u65f6\u6bb5\u90fd\u5728\u7814\u7a76VG\uff08Virtical GATE\uff09\u5806\u53e0\u65b9\u5f0f\u3002<\/p>\n \u7b80\u5355\u4ecb\u7ecd\u4e863D\u95ea\u5b58\u7684\u7ec4\u7ec7\u8fc7\u7a0b\uff0c\u4ece\u5b58\u50a8\u5143\u5f00\u59cb\uff0c\u901a\u8fc7\u5806\u53e0\u7684\u65b9\u5f0f\u5f62\u6210Wordline\uff0c\u7136\u540ewordline\u7ec4\u7ec7\u5f62\u6210\u9635\u5217\uff0c\u6700\u540e\u9635\u5217\u7ec4\u7ec7\u5f62\u6210\u82af\u7247\u3002\u6bd4\u5982\u8fd9\u8fb9\u5c31\u5c55\u73b0\u7684\u662f\u4e00\u4e2aBICS\u7684\u67b6\u6784\uff0c\u6700\u7ec8\u6784\u5efa\u4e00\u4e2a\u53ccPlane\u7684\u7ed3\u6784\u3002\u7b80\u5355\u6765\u8bf4\uff0c\u901a\u8fc7\u8fd9\u79cd\u5806\u53e0\u7684\u65b9\u5f0f\u5f62\u6210\u76843D\u95ea\u5b58\u80fd\u591f\u5b9e\u73b0\u5b58\u50a8\u5bc6\u5ea6\u6781\u5927\u5730\u6539\u5584\u3002\u7279\u522b\u662f\u968f\u7740\u5806\u53e0\u5c42\u6b21\u7684\u63d0\u9ad8\uff0c\u5bc6\u5ea6\u4e0d\u65ad\u63d0\u9ad8\u3002<\/p>\n \u968f\u4e4b\u800c\u6765\u7684\u5c31\u662f\u53ef\u9760\u6027\u95ee\u9898\u4e86\u3002\u6211\u4eec\u5173\u6ce8\u7684\u7279\u5f81\u4e3b\u8981\u662f\u56db\u4e2a\u65b9\u9762\uff1a\u4e00\u662f\u7535\u5b50\u6cc4\u9732\uff0c\u4e8c\u662f\u7f16\u7a0b\u5e72\u6270\uff0c\u4e09\u662f\u8bfb\u5e72\u6270\uff0c\u56db\u662f\u5236\u7a0b\u5dee\u5f02\u3002<\/p>\n 3D\u95ea\u5b58\u53ef\u9760\u6027\u7279\u5f81\u2014\u662f\u7535\u5b50\u6cc4\u9732\uff0c\u521d\u59cb\u7535\u5b50\u5feb\u901f\u9038\u51fa\uff0c\u6570\u636e\u5199\u5165\u540e10\u79d2\u5185\u4f1a\u51fa\u73b0\u4e00\u4e2a\u5feb\u901f\u7684\u7535\u5b50\u9038\u51fa\u7136\u540e\u8fdb\u5165\u5e73\u7a33\u9636\u6bb5\uff0c\u4ec0\u4e48\u539f\u56e0\u5462\uff1f\u662f\u7531\u4e8eCT\u5b58\u50a8\u5143\u6c27\u5316\u5c42\u8f83\u8584\uff0c\u5d4c\u5165\u5728CT\u91cc\u9762\u7684\u7535\u5b50\u4f1a\u5feb\u901f\u9038\u51fa\u4e86\u3002\u7b2c\u4e8c\u4e2a\u662f\u6e29\u5ea6\u5f02\u5e38\u5bfc\u81f4\u7684\uff0c\u6e29\u5ea6\u5bf9\u53ef\u9760\u6027\u5f71\u54cd\u4f1a\u975e\u5e38\u5927\uff0c\u8fd9\u662f2D\u548c3D\u7684\u5bf9\u6bd4\uff0c\u6211\u4eec\u53ef\u4ee5\u770b\u52303D\u95ea\u5b58\u5bf9\u6e29\u5ea6\u7684\u5f71\u54cd\u975e\u5e38\u6fc0\u70c8\uff0c\u7535\u5b50\u7535\u538b\u7684\u504f\u79bb\u5448\u73b0\u6307\u6570\u7ea7\u7684\u6ce2\u52a8\uff0c\u6e29\u5ea6\u662f\u975e\u5e38\u96be\u4ee5\u89e3\u51b3\u7684\u95ee\u9898\u3002<\/p>\n 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